Direct Observation of Single Bubble Cavitation Damage for MHz Cleaning
Hiroshi Tomita, Minako Inukai, Kaori Umezawa, Li Nan Ji |
p3 |
|
High Speed Imaging of 1 MHz Driven Microbubbles in Contact with a Rigid Wall
Aaldert Zijlstra, Tom Janssens, Kurt Wostyn, Michel Versluis, Paul W. Mertens, Detlef Lohse |
p7 |
|
Characterization of a Cavitation Bubble Structure at 230 kHz: Bubble Population, Sonoluminescence and Cleaning Potential
Andrea Otto, Till Nowak, Robert Mettin, Frank Holsteyns, Alexander Lippert |
p11 |
|
Impact of Megasonic Activation with Different Chemistries on Silicon Surface in Single Wafer Tool
Guillaume Briend, Pascal Besson, Thierry Salvetat, Sébastien Petitdidier |
p15 |
|
Impacts of Ionization Potentials and Megasonic Dispersion
Cole Franklin |
p19 |
|
The Influence of Standing Waves on Cleaning with a Megasonic Nozzle
Tom Janssens, G. Doumen, S. Halder, Kurt Wostyn, Paul W. Mertens, Joachim Straka |
p23 |
|
Megasonic Sweeping and Silicon Wafer Cleaning
J.M. Goodson, R. Nagarajan |
p27 |
|
Removal of Nano-Particles by Aerosol Spray: Effect of Droplet Size and Velocity on Cleaning Performance
K. Xu, S. Pichler, Kurt Wostyn, G. Cado, C. Springer, Glenn W. Gale, Michael Dalmer, Paul W. Mertens, Twan Bearda, E. Gaulhofer, D. Podlesnik |
p31 |
|
High Aspect Ratio Contact Clean Study in 58nm Flash Device
Pi Chun Yu, Cheng Kuen Chen, Jin Lang Lin, Chih Ning Wu, Hiroshi Matsuo |
p35 |
|
High Velocity Aerosol Cleaning with Organic Solvents: Particle Removal and Substrate Damage
Michael T. Andreas, Kurt Wostyn, Masayuki Wada, Tom Janssens, Karine Kenis, Twan Bearda, Paul W. Mertens |
p39 |
