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Papers of Title

Gettering and Defect Engineering in Semiconductor Technology VIII

Table of Contents (88 papers, 10 per page listed)


Interaction between Point Defects and Dislocations in SiGe   download PDF
Klara Lyutovich, F. Ernst, Erich Kasper, Monika Bauer, Michael Oehme
p179
Radiation Induced Defect Levels in Highly Doped n-Type Si1-xGex Strained Layers   download PDF
Edouard V. Monakhov, Andrej Yu. Kuznetsov, H.H. Radamson, Bengt G. Svensson
p185
ESR Investigations of Modulation-Doped Si/SiGe Quantum Wells   download PDF
N. Sandersfeld, W. Jantsch, Zbysław Wilamowski, Friedrich Schäffler
p191
Shallower Thermal Donor and Nitrogen-Oxygen Complex in Nitrogen Doped Czochralski Silicon   download PDF
De Ren Yang, Jie Zhang, L. Li, Duan Lin Que
p197
X-Ray Diffraction Studies of the Influence of Substitutional Carbon on Si/Ge Interdiffusion in SiGe/Si Superlattices   download PDF
P. Zaumseil, H. Rücker
p203
Radiation Defects Formation in Si   download PDF
Lyudmila I. Khirunenko, Yu.V. Pomozov, Mikhail G. Sosnin, Nikolay V. Abrosimov, M. Höhne, W. Schröder
p209
Oxygen and Peculiarities of its Precipitation in Si   download PDF
Lyudmila I. Khirunenko, Yu.V. Pomozov, Mikhail G. Sosnin, Nikolay V. Abrosimov, M. Höhne, W. Schröder
p215
The Peculiarities of a Non-Stationary Growth Kinetics in GSMBE and their Influence on Si/ Si1-xGex Interfaces Abruptness   download PDF
L.K. Orlov, A.V. Potapov, S.V. Ivin
p221
Vacancy-Gettering in Silicon: Cavities and Helium-Implantation   download PDF
F. Corni, R. Tonini, S. Frabboni, C. Nobili, G. Calzolari, S. Masetti, P. Tamarozzi, Giuseppe Pavia, G.F. Cerofolini
p229
Gettering Centres for Metals and Oxygen Formed in MeV-Ion-Implanted and Annealed Silicon   download PDF
Reinhard Kögler, A. Peeva, W. Anwand, P. Werner, A.B. Danilin, Wolfgang Skorupa
p235