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Papers of Title

Gettering and Defect Engineering in Semiconductor Technology VII

Table of Contents (76 papers, 10 per page listed)


Analyzing Oxygen Precipitation Using the Surface Photovoltage Technique (SPV)   download PDF
P. Moens, W. Dobbelaere, T. Colpaert
p149
Study of Oxygen Related Recombination Defects in Si by Temperature-Dependent Lifetime and EBIC Measurements   download PDF
Eugenijus Gaubas, Jan Vanhellemont, Eddy Simoen, C. Claeys, Winfried Seifert
p155
Oxygen Precipitate Nucleation Process in Silicon with Different Oxygen Concentration and Structural Perfection   download PDF
I.V. Antonova, Andrzej Misiuk, V.P. Popov, A.E. Plotnikov, Barbara Surma
p161
Initial Stage of Oxygen Precipitation in Silicon   download PDF
A. Kornylo, A. Maksymov, M. Pashkovski, I. Savytskii
p167
Oxygen Precipitation in Silicon Thin Layers in the Presence of Carbon   download PDF
T.M. Tkacheva, G.N. Petrov, K.L. Enisherlova, T.F. Rusak
p171
Heterogeneous Precipitation of Silicon Oxide in Silicon at Laser Induced Centres   download PDF
Yu. Blums, Arthur Medvid
p177
Diffusion and Precipitation of Oxygen in Silicon Doped with Germanium   download PDF
Lyudmila I. Khirunenko, Yu.V. Pomozov, V.I. Shakhovtsov, V.V. Shumov
p183
Low-Temperature Doping of P-Type Czochralski Silicon due to Hydrogen Plasma Enhanced Thermal Donor Formation   download PDF
Alexander G. Ulyashin, Yu.A. Bumay, Reinhart Job, G. Grabosch, D. Borchert, Wolfgang R. Fahrner, A.Yu. Diduk
p189
Erbium in Silicon: Problems and Challenges   download PDF
Simona Binetti, M. Donghi, Sergio Pizzini, Antonio Castaldini, Anna Cavallini, B. Fraboni, N.A. Sobolev
p197
Thermal Donors in Silicon Doped with Erbium   download PDF
Valentin V. Emtsev, N.A. Sobolev, Boris A. Andreev, D.S. Poloskin, Elena I. Shek
p207