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Papers of Title

Gettering and Defect Engineering in Semiconductor Technology

Table of Contents (83 papers, 10 per page listed)


Solubility of Hydrogen in Silicon at High Temperatures   download PDF
R.C. Newman, M.J. Binns, S.A. McQuaid, Edward C. Lightowlers
p155
Effect of Oxygen Concentration on the Kinetics of Oxygen Loss and Thermal Donor Formation in Silicon at Temperatures between 350° C and 500° C   download PDF
Charalamos A. Londos, S.A. McQuaid, M.J. Binns, R.C. Newman, J.H. Tucker
p161
Evolution of Oxygen Clusters and Agglomerates in Annealed Cz-Si at High Pressure - High Temperature   download PDF
Andrzej Misiuk, J. Adamczewska, Jadwiga Bak-Misiuk, Josh Wolf
p167
Peculiarities in the Defect Behavior in Heat-Treated Cz-Si with a Low and High Oxygen Content   download PDF
Valentin V. Emtsev, Gagik A. Oganesyan, K. Schmalz
p173
New Evidences about Carbon and Oxygen Segregation Processes in Polycrystalline Silicon   download PDF
Simona Binetti, Sandro Ferrari, Maurizio Acciarri, S. Acerboni, R. Canteri, Sergio Pizzini
p181
Oxygen and Copper Precipitation at the Silicon/Silicon Dioxide Interface   download PDF
A. Correia, J.L. Maurice, A. Boutry-Forveille, D. Ballutaud
p191
The Role of Oxygen for Defect Formation in Oxygen-Rich Si- and Si1-xGex - Layers on Silicon Grown by APCVD   download PDF
D. Krüger, Th. Morgenstern, R. Kurps, Ch. Quick
p197
Annealing Properties of N-Doped Cz-Si Crystals   download PDF
Chin Sheng Chen, Fu Long Dai, H.J. Ye, Y.C. Huang, De Ren Yang, H.N. Yao
p203
Oxygen-Related Clusters of Platinum in Silicon - an Electron Spin Resonance Study   download PDF
M. Höhne, U. Juda
p207
Formation and Properties of Tetranuclear Clusters of Manganese in Silicon   download PDF
J. Kreissl, W. Gehlhoff
p213