2-Inch 4H-SiC Homoepitaxial Layer Grown on On-Axis C-Face Substrate by CVD Method
Kazutoshi Kojima, Hajime Okumura, Satoshi Kuroda, Kazuo Arai, Akihiko Ohi, Hiroyuki Akinaga
|
p93 |
Investigation of Basal Plane Dislocations in the 4H-SiC Epilayers Grown on {0001} Substrates
Hidekazu Tsuchida, Toshiyuki Miyanagi, Isaho Kamata, Tomonori Nakamura, Kunikaza Izumi, Koji Nakayama, R. Ishii, Katsunori Asano, Yoshitaka Sugawara
|
p97 |
Epitaxial Growth and Characterisation of Phosphorus Doped SiC Using TBP as Precursor
Anne Henry, Erik Janzén
|
p101 |
Experimental Investigation and Simulation of Silicon Droplets Formation during SiC CVD Epitaxial Growth
Galyna Melnychuck, Yaroslav Koshka, Michael S. Mazzola, Jeffery L. Wyatt
|
p105 |
Structural Improvement of Seeds for Bulk Crystal Growth by Using Hot-Wall CVD of 4H-SiC
Günter Wagner, D. Schulz, J. Doerschel
|
p109 |
CVD Growth and Characterization of 4H-SiC Epitaxial Film on (11-20) As-Cut Substrates
Ze Hong Zhang, Ying Gao, Arul Arjunan, Eugene Toupitsyn, Priyamvada Sadagopan, Robert M. Kennedy, Tangali S. Sudarshan
|
p113 |
Evaluation of p-Type Doping for (1,1,-2,0) Epitaxial Layers Grown on α-Cut (1,1,-2,0) 4H-SiC Substrates
Caroline Blanc, Marcin Zielinski, Veronique Soulière, C. Sartel, Sandrine Juillaguet, Sylvie Contreras, Jean Camassel, Yves Monteil
|
p117 |
Aluminium Doping of 4H-SiC Grown with HexaMethylDiSilane
C. Sartel, Veronique Soulière, Marcin Zielinski, Yves Monteil, Jean Camassel, S. Rushworth
|
p121 |
Is the Al Solubility Limit in SiC Temperature Dependent or not?
Christophe Jacquier, Gabriel Ferro, Marcin Zielinski, Efstathios K. Polychroniadis, A. Andreadou, Jean Camassel, Yves Monteil
|
p125 |
Homoepitaxial Growth on 4H-SiC (03-38) Face by Sublimation Close Space Technique
S. Yoneda, Tomoaki Furusho, H. Takagi, S. Ohta, Shigehiro Nishino
|
p129 |