Influence of the Crystal Thickness on the SiC PVT Growth Rate
Dimitri I. Cherednichenko, Yuri I. Khlebnikov, Roman Drachev, I.I. Khlebnikov, Tangali S. Sudarshan
|
p95 |
Micropipe Formation Model via Surface Step Interaction
Noboru Ohtani, Masakazu Katsuno, Tatsuo Fujimoto, Takashi Aigo, Hirokatsu Yashiro
|
p99 |
Self-Healing Phenomenon of Micropipes in Silicon Carbide
Atsuto Okamoto, Yoshiki Seno, Naohiro Sugiyama, Fusao Hirose, Kazukuni Hara, Toshihiko Tani, Daisuke Nakamura, Nobuo Kamiya, Shoichi Onda
|
p103 |
A Method of Reducing Micropipes in Thin Films by Using Sublimation Growth
Naoki Oyanagi, Shinichi Nishizawa, Kazuo Arai
|
p107 |
Dislocation Constraint by Etch-Back Process of Seed Crystal in SiC Bulk Crystal Growth
Tomohisa Kato, Naoki Oyanagi, Yasuo Kitou, Shinichi Nishizawa, Kazuo Arai
|
p111 |
The Effect of Nitrogen on Crystal Growth of SiC on (11-20) Substrates
Taro Nishiguchi, Yasuichi Masuda, Satoru Ohshima, Shigehiro Nishino
|
p115 |
Temperature Dependence of Sublimation Growth of 6H-SiC on (11-20) Substrates
Taro Nishiguchi, Yasuichi Masuda, Satoru Ohshima, Shigehiro Nishino
|
p119 |
The Development of 4H-SiC {03-38} Wafers
Koji Nakayama, Youichi Miyanagi, Hiromu Shiomi, Shigehiro Nishino, Tsunenobu Kimoto, Hiroyuki Matsunami
|
p123 |
Incorporation of Boron and the Role of Nitrogen as a Compensation Source in SiC Bulk Crystal Growth
Matthias Bickermann, Roland Weingärtner, Dieter Hofmann, Thomas L. Straubinger, Albrecht Winnacker
|
p127 |
Aluminum Doping of 6H- and 4H-SiC with a Modified PVT Growth Method
Thomas L. Straubinger, Matthias Bickermann, Michael Rasp, Roland Weingärtner, Peter J. Wellmann, Albrecht Winnacker
|
p131 |