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Papers of Title

Ion Implantation in Semiconductors

Table of Contents (27 papers, 10 per page listed)


Implantation of Silicon in Indium Phosphide for Metal Insulator Semiconductor Transistors   download PDF
N. Duhamel, G. Post, P. Krauz, P. Henoc, B. Descouts
p361
Thermal Annealing of Be Implanted InSb   download PDF
H. Alberts, R. Cilliers
p371
Range of Various Implanted Ions in III-V Materials   download PDF
Pierre-Noel Favennec, M. Gauneau, M. Salvi
p377
The Compositional Disordering of AlGaAs/GaAs Superlattices by Si and Be Ion Implantation   download PDF
Jyunji Kobayashi
p417
Low-Energy Hydrogen-Ion Implantation in Zinc Oxide   download PDF
G. Yaron, Y. Goldstein, A. Many
p429
Optical Properties of Hydrogen-Implanted Semiconductors   download PDF
Jakub Tatarkiewicz
p457
Structure of Radiation Damage in Germanium Induced by Te+-Implantation Near Channeling Conditions   download PDF
M.G. Kalitzova, D.S. Karpuzov, N.K. Pashov
p465