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Papers of Title

Gettering anf Defect Engineering in Semiconductor Technology IX

Table of Contents (128 papers, 10 per page listed)


Optical Properties of Oxygen Agglomerates in Silicon   download PDF
Simona Binetti, Sergio Pizzini, E. Leoni, R. Somaschini, Antonio Castaldini, Anna Cavallini
p75
Positron Annihilation Studies of Oxygen Precipitation in Silicon and of Nano-Precipitates in Si-Rich SiO2 Films: Role of Vacancy-Like Defects   download PDF
Roberto S. Brusa, W. Deng, Grzegorz P. Karwasz, Antonio Zecca
p81
Silicon Isotope Shifts of the 648-cm-1 Infrared Absorption Line of Oxygen in Silicon   download PDF
Hiroshi Yamada Kaneta
p87
Thermal Donors in Silicon Implanted with Rare Earth Impurities   download PDF
Valentin V. Emtsev, C.A.J. Ammerlaan, Boris A. Andreev, Gagik A. Oganesyan, D.S. Poloskin, Elena I. Shek, N.A. Sobolev
p93
Interfacial Oxygen Thermodonor Formation in Plasma-Hydrogenated Silicon   download PDF
G.N. Kamaev, V.V. Bolotov, S.A. Chern'aev, M.D. Efremov
p99
Vibrational Modes of Oxygen Dimers in Germanium   download PDF
Valentin V. Litvinov, L.I. Murin, J. Lennart Lindström, V.P. Markevich, A.A. Klechko
p105
Oxygen Precipitation in Silicon Doped with Tin   download PDF
Lyudmila I. Khirunenko, Yu.V. Pomozov, Mikhail G. Sosnin
p111
Hydrostatic Pressure Effect on Redistribution of Oxygen Atoms in Oxygen-Implanted Silicon   download PDF
Andrzej Misiuk, Adam Barcz, Jacek Ratajczak, I.V. Antonova, J. Jun
p115
Elastic Instability of Strained Spherical Precipitates as a Cause of Oxide Platelets in Silicon   download PDF
Vladimir V. Voronkov, Robert J. Falster
p121
Impact of Hydrogen on Oxygen Precipitation and Gate Oxide Integrity after RTA Processing   download PDF
Timo Müller, G. Obermeier, T. Bearda, A. Huber, R. Schmolke, Wilfried von Ammon, Wilfried Lerch
p127