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Papers of Title

Gettering and Defect Engineering in Semiconductor Technology

Table of Contents (83 papers, 10 per page listed)


ULSI Technology - a Complex Device Manufacturing Process   download PDF
S.J. Hillenius
p1
Semiconductor Isotope Engineering   download PDF
Eugene E. Haller
p11
Crystalline Silicon for Solar Cells   download PDF
G. Martinelli
p21
Light-Emitting Porous Silicon: A Defective Quantum Sponge Structure?   download PDF
U.M. Gösele, V. Lehmann
p27
Semiconducting Silicide-Silicon Heterostructures   download PDF
J. Chevrier, J.Y. Natoli, Isabelle Berbezier, Antoine Ronda, J. Derrien
p39
What Local-Density Calculations Can Teach about Semiconductor Surfaces, Interfaces and Defects   download PDF
M. Methfessel, Jaroslaw Dąbrowski
p51
Mechanisms of Transition Metal Gettering in Silicon   download PDF
D. Gilles
p57
Gettering in Silicon under Vacancy Generation Conditions   download PDF
N.T. Bagraev, L.E. Klyachkin, V.L. Sukhanov
p71
Phosphorus External Gettering Efficiency in Multicrystalline Silicon Wafers   download PDF
Isabelle Périchaud, F. Floret, M. Stemmer, Santo Martinuzzi
p77
Defect Engineering in Erbium-Doped Silicon Structure Technology   download PDF
N.A. Sobolev, O.V. Alexandrov, B.N. Gresserov, G.M. Gusinskii, V.O. Naidenov, E.I. Sheck, V.I. Stepanov, Yu.V. Vyzhigin, L.F. Chepik, E.P. Troshina
p83