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Papers of Title

Gettering and Defect Engineering in Semiconductor Technology

Table of Contents (83 papers, 10 per page listed)


PN Junction Formation by Two Steps Annealing   download PDF
Chin Sheng Chen, Chiufeng Lin, M.C. He, De Ren Yang, Duan Lin Que
p89
Generation of the P-Induced Misfit Dislocations during the Diffusion in Silicon: Analytical Determination of the Criticy Conditions   download PDF
F. Gaiseanu, R. Plugaru, M. Bazu, O. Buiu
p93
Processes of Defect Formation and Gettering under Dry Etching of Si and GaAs and Measurements of Diffusion Length Profile   download PDF
Eugene B. Yakimov, O.V. Kononchuk
p99
On the Interaction of Transition Metals with Silicon Grain Boundaries   download PDF
M. Stemmer, Santo Martinuzzi, Marcel Pasquinelli
p105
Dry Cleaning of Silicon Wafers in a Low Energy Hydrogen Plasma   download PDF
J. Ramm, E. Beck, Alex Dommann, Ignaz Eisele, D. Krüger, G. Lippert
p111
Reduction of Interfacial Carbon and Boron Contamination as Sources for Degradation of Epitaxial SiGe Layers Grown by MBE   download PDF
H.P. Zeindl, G. Lippert, J. Drews, R. Kurps, H.J. Osten
p117
Misfit Strain Engineering in Heteroepitaxial Structures   download PDF
Hans Richter, A. Fischer, H. Kühne, M. Eichler
p123
Surfactant-Mediated MBE of Strained-Layer III-V Semiconductor Heterostructures   download PDF
K. Ploog, E. Tournié
p129
Transition Metal Gettering in Poly-Silicon for Photovoltaic Applications (Abstract)   download PDF
Eicke R. Weber, J. Bailey
p141
Properties of Hydrogen, Oxygen and Carbon in Si   download PDF
A.L. Endrös
p143