| ISBN / ISBN-13: | 3-908450-00-4 / 978-3-908450-00-9 |
|---|---|
| Year: | 1993 |
| Title: | Gettering and Defect Engineering in Semiconductor Technology [online] |
| Subtitle: | GADEST '93 |
| Authors/Editors: | H.G. Grimmeiss, M. Kittler and H. Richter |
| Published in: | Solid State Phenomena, Volumes 32 - 33 |
| Category: | Proceedings of the 5th International Autumn Meeting, Chossewitz, Frankfurt (Oder), Germany, October 09-14, 1993 |
| Pages: | 650 |
| Edition: | softcover |
| Description: | |
| TOC: | Table of Contents |
| Prices: | USD: 298.00 / EUR: 216.00 |
