| ISBN / ISBN-13: | 3-908044-04-9 / 978-3-908044-04-8 |
|---|---|
| Year: | 1989 |
| Title: | Gettering and Defect Engineering in Semiconductor Technology [online] |
| Authors/Editors: | M. Kittler |
| Published in: | Solid State Phenomena, Volumes 6 - 7 |
| Category: | Proceedings of the 3rd International Conference on Gettering and Defect Engineering in Semiconductor Technology (GADEST '89) held at Garzau, GDR, October 1989 |
| Pages: | 620 |
| Edition: | |
| Description: | |
| TOC: | Table of Contents |
| Prices: | USD: 276.00 / EUR: 200.00 |
