A High Precision AFM for Nanometrology of Large Area Micro-Structured Surfaces
J. Aoki, Wei Gao, S. Kiyono, T. Ono |
p65 |
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A Study on the Mechanism of a New High Speed Scanning Miniature Nano-Measurement Probe
Kuang Chao Fan, Y.J. Chen |
p71 |
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Use of Fiber Interferometer for AFM Cantilever Probe Displacement Control
N.C. Shie, T.L. Chen, Kai Yuan Cheng |
p77 |
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Determining the Radial Modulus of DNA Measured by VPSFM
Y.H. Chen, X.J. Li, X.F. Zhou, Jia Lin Sun, W.H. Huang, J. Hu |
p83 |
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Pitch Calibration by an Active Temperature Controlled Traceable Atomic Force Microscope and a Laser Diffractometer
Chao Jung Chen, S.P. Pan, L.C. Chang |
p89 |
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Micro-Force Calibration with an All-Coil Magnetic Levitation
S.W. Hsu, T.L. Chen |
p95 |
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Effect of Residual Stresses on a Micromachined Z-Axis Vibrating Rate Gyroscope
A.P. Qiu, Y. Su, S.R. Wang, B.L. Zhou |
p101 |
|
A Measurement System for Step Imprint Lithography
H.Z. Liu, Bing Heng Lu, Y.C. Ding, D.C. Li, Yi Ping Tang, T. Jin |
p107 |
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Design and Simulation of a DETF for Use in a Resonant Gyroscope
Yi Lun Zhu, S.R. Wang, A.P. Qiu |
p113 |
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Micro Angle Measurement for a Scanning Stage
Qing Gang Liu, M. Li, D.C. Li, Z.G. Li, X.T. Hu |
p119 |
