Progress and Limits of the Numerical Simulation of SiC Bulk and Epitaxy Growth Processes
Michel Pons, Elisabeth Blanquet, Jean Marc Dedulle, M. Ucar, Peter J. Wellmann, Örjan Danielsson, Pierre Ferret, Lea Di Cioccio, Francis Baillet, Didier Chaussende, Roland Madar |
p3 |
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Growth of Large Diameter SiC Crystals by Advanced Physical Vapor Transport
Thomas Anderson, Donovan L. Barrett, J. Chen, Ejiro Emorhokpor, A. Gupta, R.H. Hopkins, Andrew E. Souzis, C.D. Tanner, Murugesu Yoganathan, Ilya Zwieback, Wolfgang J. Choyke, Robert P. Devaty, Fei Yan |
p9 |
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Crystalline Quality Evaluation of 6H-SiC Bulk Crystals Grown from Si-Ti-C Ternary Solution
Kazuhiko Kusunoki, Kazuhito Kamei, Y. Ueda, S. Naga, Y. Ito, Mitsuhiro Hasebe, Toru Ujihara, Kazuo Nakajima |
p13 |
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Growth of 2 Inches 6H-SiC Single Crystals by Sublimation Method: The Comparison of α- and ß-SiC Powders
Soo Hyung Seo, Joon Suk Song, Myung Hwan Oh, Yen Zen Wang |
p17 |
|
A Study of 6H-Seeded 4H-SiC Bulk Growth by PVT
Eugene Y. Tupitsyn, Arul Arjunan, Robert T. Bondokov, Robert M. Kennedy, Tangali S. Sudarshan |
p21 |
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Modified Physical Vapor Transport Growth of SiC - Control of Gas Phase Composition for Improved Process Conditions
Peter J. Wellmann, Thomas L. Straubinger, Patrick Desperrier, Ralf Müller, Ulrike Künecke, Sakwe Aloysius Sakwe, Holger Schmitt, Albrecht Winnacker, Elisabeth Blanquet, Jean Marc Dedulle, Michel Pons |
p25 |
|
High Al-Doping of SiC Using a Modified PVT (M-PVT) Growth Set-Up
Ralf Müller, Ulrike Künecke, Roland Weingärtner, Holger Schmitt, Patrick Desperrier, Peter J. Wellmann |
p31 |
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Growth of Undoped (Vanadium-Free) Semi-Insulating 6H-SiC Single Crystals
Thomas Anderson, Donovan L. Barrett, J. Chen, Ejiro Emorhokpor, A. Gupta, R.H. Hopkins, Andrew E. Souzis, C.D. Tanner, Murugesu Yoganathan, Ilya Zwieback |
p35 |
|
Effect of Nitrogen Doping on the Formation of Planar Defects in 4H-SiC
D. Siche, M. Albrecht, J. Doerschel, K. Irmscher, H. J. Rost, M. Rossberg, D. Schulz |
p39 |
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Evolution Roots of Growth-Induced Polytype Domains in 6H-SiC Single Crystals
Soo Hyung Seo, Joon Suk Song, Myung Hwan Oh, Yen Zen Wang |
p43 |
