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Papers of Title

Semiconductor Processing and Characterization with Lasers

Table of Contents (55 papers, 10 per page listed)


Femtosecond Time-Resolved Microscopy of Laser-Induced Morphology Changes   download PDF
D. von der Linde
p1
Low Temperature Deposition and Crystallization of Silicon by Means of Laser Techniques   download PDF
Motohiro Hirose
p7
Femtosecond-Pulse Laser Microstructuring of Semiconducting Materials   download PDF
W. Kautek, Joachim Krüger
p17
Modification of Foreign Atom Concentrations and Profiles in Silicon and Si1-x-y GexCy Alloys by Laser Chemical Etching   download PDF
J. Boulmer, A. Desmur, B. Bourguignon, J.-B. Ozenne, R. Laval, A. Aliouchouche, D. Débarre, J.-P. Budin
p23
Properties of Recrystallized Amorphous Silicon Prepared by XeCl Excimer Laser Irradiation   download PDF
I. Ulrych, K.M.A. El-Kader, V. Cháb, J. Kocka, P. Prikryl, V. Vydra, R. Cerný
p29
Kinetics of Laser-Induced Synthesis and Crystallization of Thin Semiconductors Films   download PDF
K. Kolev, L.D. Laude
p35
Surface Patterning and Thin-Film Formation by Pulsed-Laser Ablation   download PDF
D. Bäuerle, Enno Arenholz, J. Heitz, S. Proyer, E. Stangl, B. Luk'yanchuk
p41
Laser Patterning of CuInSe2/Mo/SLS Structures for the Fabrication of CuInSe2 Sub Modules   download PDF
L. Quercia, S. Avagliano, A. Parreta, E. Salza, P. Menna
p53
UV-Excimer Laser Ablation Patterning of II-VI Compound Semiconductors   download PDF
P.H. Key, D. Sands, F.X. Wagner
p59
Fabrication and Characterisation of N+ Doped Laser Crystallised Polysilicon   download PDF
E. Al-Nuaimy, J.M. Marshall, T.E. Dyer, A.R. Hepburn, J.F. Davies
p67