| ISBN / ISBN-13: | 0-87849-575-4 / 978-0-87849-575-7 |
|---|---|
| Year: | 1988 |
| Title: | Ion Implantation in Semiconductors [online] |
| Authors/Editors: | D. Stievenard and J.C. Bourgoin |
| Published in: | Solid State Phenomena, Volumes 1 - 2 |
| Category: | |
| Pages: | 480 |
| Edition: | |
| Description: | The volume presents approximately 30 invited contributions. 1. SILICON . 2. APPLICATION TO TECHNOLOGY . 3. COMPOUND SEMICONDUCTORS . 4. HETEROSTRUCTURES . 5. HYDROGEN IMPLANTATION . 6. GERMANIUM . |
| TOC: | Table of Contents |
| Prices: | USD: 276.00 / EUR: 200.00 |
