| ISBN-13: |
978-0-87849-568-9 |
| Year: |
1991 |
| Title: |
Gettering and Defect Engineering in Semiconductor Technology
[online]
|
| Authors/Editors: |
M. Kittler and H. Richter |
| Published in: |
Solid State Phenomena, Volumes 19 - 20
|
| Category: |
Proceedings of the 4th International Conference on Gettering and Defect Engineering In Semiconductor Technology (GADEST '91), Frankfurt, Germany, October 1991 |
| Pages: |
660 |
| Edition: |
|
| Description: |
The volume contains 78 contributions to the important field of semiconductor defect control and defect engineering.
|
| TOC: |
Table of Contents |
| Prices: |
USD: 276.00 / EUR: 212.00 |
