Resistivity Distribution in Undoped 6H-SiC Boules and Wafers
Qiang Li, A.Y. Polyakov, Marek Skowronski, Edward K. Sanchez, Mark J. Loboda, Mark A. Fanton, Timothy Bogart, Rick D. Gamble, N.B. Smirnov, Yuri N. Makarov
|
p51 |
The Method for Enhancing Nitrogen Doping in 6H-SiC Single Crystals Grown by Sublimation Process: The Effect of Si Addition in SiC Powder Source
Kwan Mo Kim, Soo Hyung Seo, Jae Woo Kim, Joon Suk Song, Myung Hwan Oh, Wook Bahng, Eun Dong Kim
|
p55 |
A Study of Nitrogen Incorporation in PVT Growth of n+ 4H SiC
Darren M. Hansen, Gil Yong Chung, Mark J. Loboda
|
p59 |
In Situ Observation of Mass Transfer in the CF-PVT Growth Process by X-Ray Imaging
Didier Chaussende, Peter J. Wellmann, M. Ucar, Michel Pons, Roland Madar
|
p63 |
Growth and Surface Morphologies of 6H SiC Bulk and Epitaxial Crystals
Govindhan Dhanaraj, Yi Chen, Michael Dudley, Hui Zhang
|
p67 |
Processing of Poly-SiC Substrates with Large Grains for Wafer-Bonding
Guy Chichignoud, Laurent Auvray, Elisabeth Blanquet, Mikhail Anikin, Etienne Pernot, Jean Marie Bluet, Patrick Chaudouët, Michel Mermoux, Catherine Moisson, Fabrice Letertre, Michel Pons, Roland Madar
|
p71 |
Modeling and Experimental Verification of SiC M-PVT Bulk Crystal Growth
Peter J. Wellmann, Ralf Müller, Michel Pons
|
p75 |
Basal Plane Dislocation Dynamics in Highly p-Type Doped versus Highly n-Type Doped SiC
Peter J. Wellmann, Desirée Queren, Ralf Müller, Sakwe Aloysius Sakwe, Ulrike Künecke
|
p79 |
High Quality SiC Crystals Grown by the Physical Vapor Transport Method with a New Crucible Design
Kap Ryeol Ku, Jung Kyu Kim, Jung Doo Seo, Ju Young Lee, Myung Ok Kyun, Won Jae Lee, Geun Hyoung Lee, Il Soo Kim, Byoung Chul Shin
|
p83 |
Active Thermal Interaction of Source and Crystal Surfaces in PVT SiC Crystal Growth
Krzysztof Grasza, Emil Tymicki, Jaroslaw Kisielewski
|
p87 |