| ISBN / ISBN-13: | 0-87849-391-3 / 978-0-87849-391-3 |
|---|---|
| Year: | 2008 |
| Title: | Rapid Thermal Processing and beyond: Applications in Semiconductor Processing [online] |
| Authors/Editors: | W. Lerch and J. Niess |
| Published in: | Materials Science Forum, Volumes 573 - 574 |
| Category: | Special topic volume with invited papers only |
| Pages: | 448 |
| Edition: | softcover |
| Description: | in preparation |
| TOC: | Table of Contents |
| Prices: | USD: 274.00 / EUR: 198.00 |
