New Synthetic Heterodyne Laser Doppler Vibrometer for Measurement of Mechanical Vibrations with Submicron Amplitude
Seong Gu Kang, J.P. La, H.S. Yoon, D.Y. Choi, K.H. Park
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p43 |
Development of the Precision Stage with Nanometer Accuracy and a Millimeter Dynamic Range
D.H. Jeong, Hyun Kyu Kweon, Y.S. Kim
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p47 |
Quasi-Common-Path Laser Feedback Interferometers for Precision Measurement of Non-Cooperative Targets
X.J. Wan, Shu Lian Zhang
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p49 |
Self-Mixing Interferometer Based on Four-Bucket Integration Technique for Micro-Displacement Measurement
Dong Mei Guo, Ming Wang
|
p53 |
Micro-Nanometer Positioning Control of Bimodal Ultrasonic Motor Based on Wavelet Differential Actuation Pattern
Cong Yu Xu, Xiao Fen Yu
|
p57 |
Adaptive Fiber-Optical Sensor System for Pico-Strain and Nano-Displacement Metrology
Roman V. Romashko, Yuri Kul'chin, S.D. Girolamo, A. Kamshilin, J.C. Launay
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p61 |
The Development of a Separated Mini-Environment
Hui Zhang, Z. Cai, K.C. Fan
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p65 |
Signal Denoising of MEMS Microstructure Profile
Kai Hu, Xiang Qian Jiang, Xiao Jun Liu
|
p69 |
Measurement and Analysis of Radial Error Motion of a Miniature Ultra-High-Speed Spindle
Kengo Fujimaki, Kimiyuki Mitsui
|
p73 |
Development of Measurement System for Accuracy Control in Subsection Manufacture
F. Zhang, Xing Hua Qu, J.F. Dai, S. Ye
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p79 |