| ISBN-13: | 978-0-87849-321-0 |
|---|---|
| Year: | 2009 |
| Title: | NEMS/MEMS Technology and Devices - ICMAT2009 [online] |
| Authors/Editors: | Selin Teo, A. Q. Liu, H. Li and B. Tarik |
| Published in: |
Advanced Materials Research, Volume 74
|
| Category: | Selected, peer reviewed papers from the International Conference on Materials for Advanced Technologies 2009, (ICMAT 2009), Symposium L, 28 June – 3 July, Singapore |
| Pages: | 334 |
| Edition: | softcover |
| Description: | This second book on the subject of MEMS covers contemporary topics of importance to science, engineering and the technology of materials. The emphasis of this book has been placed on Nanoelectromechanical Systems (NEMS) /Microelectromechanical Systems (MEMS) technology and devices. In particular, the associated symposium aimed to cover not only applications that involve MEMS design, but also its modeling, fabrication processes (e.g. semiconductors, polymers, etc.) lab-on-a-chip, and biophotonic medical devices (e.g. DNA, protein and cell-sorting, etc). The focus of these points of interest were the exploration of new devices, and process innovation and engineering application, especially as related to NEMS/MEMS technology and devices. Overall, this makes for a fascinating survey of the subject. |
| TOC: | Table of Contents |
| Prices: | USD: 218.00 / EUR: 167.00 |
